This paper focuses on an on-state voltage measurement circuit for high power module applications (up to 3.3kV, 500A Sic module). A power module switching oscillation model is used to design and fine tune the proposed solution. The proposed solution is designed to be compatible with the source driver topology. Finally, it is successfully tested on a double pulse test for various power module base plate temperatures and compared to a curve tracer Keysight B1505.