A 10 kV, 50 A SiC MOSFET phase-leg package is proposed which combines an innovative lateral spring-pin terminal with wirebond-less molybdenum interconnects to enable < 10 nH parasitic inductance and double sided cooling. The module utilizes additively manufactured jet-impingement coolers, integrated directly into the module housing. The coolers allow the four, 3rd generation 10 kV MOSFET dies to operate at a junction temperature of 102oC under a heat load of 200 W/cm2 and a conservative coolant temperature of 45oC. Static characterization showed an on-state resistance of 168 mΩ at a forward current of 50 A and a reverse leakage of <200 nA at 9.5 kV. During switching tests, a maximum slew rate of 120 V/ns was observed.
