The capacitance-voltage (C-V) characterization of the capacitors and capacitances of power semiconductor devices is vital for circuit analysis. This paper discusses the capacitive coupling method using an LCR meter for the C-V characterization. It requires an LCR meter and inexpensive passive components. However, unaccounted effects of the parameters such as parasitic inductance and power supply impedance can significantly affect the measurement accuracy. In this paper, considering these effects, analytical formulas of the expected error are presented. The measurement circuit with the measurement range of 10 kHz-1 MHz with less than 1% error was designed using analytical equations and validated experimentally.
