In this work, a MV 5-L hybrid ANPC converter with inner-interleaved configuration is proposed featuring improved power quality and ease of filtering design. Within the implemented MV prototype, 3.3kV Si IGBT half-bridge modules and custom designed compact 3.3 kV SiC H-bridge module are used, and the design process of the low inductance SiC H-bridge module is also presented in this digest. By the presented design, the implemented prototype achieves good power quality under 100kHz switching frequency with high estimated converter power efficiency.