Director of Fab Environmental Solutions Applied Materials, California, United States
The digitalization of subfab operation and the synchronization between process and support function offers a substantial potential on one hand to improve sustainability on the path to net zero carbon footprint semiconductor manufacturing and on the other hand to improve process stability and efficiency.
Digitalization, smart sensoring, fast extensive communication and advanced data mining technologies support that process enabling eco efficient manufacturing, predictive preventive maintenance and finally the reduction of downtimes and less sensitivity to excursions.
The presentation will show how solutions have been implemented and ways for further improvements.
