Nelson Felix, PhD

Director, Process Technology
IBM

Nelson Felix joined IBM in 2008 and is currently the Director of Process Technology at IBM Research in Albany, NY. In this role, Nelson is responsible for the demonstration and enablement of new tooling, processes, materials, and metrology to support IBM’s leading-edge CMOS device and AI hardware roadmap. Nelson received his B.S. from the University of Massachusetts, Amherst (2002) and his Ph.D. from Cornell University (2007), both in chemical engineering, and his doctoral work centered on the characterization of novel photoresist materials for EUV. Dr. Felix is an SPIE Fellow, and he is co-inventor on over 50 patents and co-author on over 100 publications.

Disclosure information not submitted.

Presentation(s):

• Ecosystem Readiness for Scaling and Lithography at 3nm and Below

  Thursday, July 14, 2022
  10:30am – 3:30pm

• The Path to 100 Billion Goes Upward – IBM Research Semiconductors Technology Atlas

  Thursday, July 14, 2022
  10:35am – 10:55am