Director, Head of Global Marketing, Clean & Etch, Specialty Gases Business EMD Electronics
Semi industry leaders announced aggressive target of reducing green house gas emissions as well as reaching net-zero carbon era We, at EMD as a material solution provider, aims to develop low GWP gases to enable our customers to achieve such sustainability goals. Building on 350years proven history of pioneering chemistry, EMD leads the development of new low-GWP gas solution based on science and innovation, accelerating key development cycles, including;
- Identification of new molecule research & its synthesis technology - Screening of candidate chemical through state-of-art process simulation study - Testing etch performance and emission rate at Dry Etch lab
Adoption of new low GWP gas across industry may take longer than expected due to complexity, and thus drag on the journey of reaching industry sustainability target timeline. Typical new alternative molecule development process would undergo research, screening, lab testing, application testing at tool maker, evaluation at customer process, pilot-scale manufacturing, and high volume manufacturing. Entire process would take 5 ~ 10 years depending upon the complexity and performance (etch rate, emission, cost, corrosiveness..etc) targets. Combination of customer/product/process/tech node just adds the complexity and duration of development cycle.
Now, it becomes clear that closer collaboration and well-defined planning & execution are essential to success in this endeavor to achieve sustainability goal, including following areas;
- How do we establish the focus area by product or by process ? Abatement or new GWP gas , as an example ? - How can we reduce the cycle time of evaluation ? - Testing & development at common platform ? By product & by application ? Is it realistic from IP perspective ?
EMD ELectronics is uniquely positioned to support semi industry-wide goal of reducing green house gases and well positioned to partner with industry leaders to address the challenges above and drive to achieve the goal.
