In this paper, we report the reliability characterization of IGZO device, in which a sputtering process of IGZO and ILD annealing is carefully optimized to enhance display performance at low frequency. In comparison with LTPS, IGZO device reveals process maturity enabling decent display image performance and robust reliability, including image sticking index, BTS, HCI, TDDB and self heating as a reliability qualification matrix. Technology maturity proven in panel and product level throughout competitive performance characterization and stringent reliability assessment successfully demonstrates that IGZO device technology is ready for high volume production.
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