Senior Principal Scientist KLA Corporation Milpitas, California
MicroLED displays have many key advantages over other technologies; however, cost remains a key challenge to wide market acceptance. Reducing cost requires improvements in microLED chip yield and reliability. Improvements are achieved by process control, including finding defects with inspection tools, and variations with metrology tools. Traditional LED manufacturing has relied on spot checks and end-of-line inspection with a cost-conscious “good enough” mentality towards process control, however, in order to achieve the performance and cost point needed for high volume adoption of microLEDs the industry will require a paradigm shift towards a “semiconductor manufacturing” process control mindset. Additionally, inline screening, enabled by multi-channel high-speed LED scanning inspection, provides statistical identification of die which are a high reliability risk using the Inline Part Average Testing (I-PAT®) methodology.
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